مروری بر مشخصه‌های پوشش‌های الماس مصنوعی تهیه شده به روش ‌رسوب‌دهی شیمیایی از فاز بخار (CVD)

نوع مقاله : مقاله مروری

نویسندگان

1 دانشیار، گروه پژوهشی نانو فناوری رنگ، پژوهشکده پوشش های سطح و فناوری های نوین، پژوهشگاه رنگ

2 دانشجوی دکترا، دانشکده مهندسی انرژی، دانشگاه شهید بهشتی

3 استادیار، گروه پژوهشی علوم و فناوری چاپ، پژوهشکده فیزیک رنگ

چکیده

الماس در مقایسه با سایر مواد، دارای خواص فیزیکی بسیار ‌ویژه‌ای ‌می‌باشد. علیرغم این ویژگی‌ها، کاربردهای عملی آن در صنعت، به علت کمیابی و قیمت بالا، بسیار محدود است. با توجه به پیشرفت‌های اخیر فناوری، تهیه پوشش‌های نازک الماس مصنوعی بر سطح بسترهای مختلف امکان‌پذیر گشته است. به عنوان مثال، اعمال یک لایه الماس مصنوعی به روش ‌رسوب‌دهی شیمیایی از فاز بخار (CVD) بر سطح ابزارهای مورد استفاده در صنعت ماشین‌کاری، منجر به بهبود کارایی این ابزارها خواهد شد. در حال حاضر تقاضای استفاده صنعتی از پوشش‌های الماس مصنوعی، به دلیل خواصی چون مقاومت سایشی بالا، سختی فوق العاده و ضریب اصطکاک کم، به شدت افزایش یافته است و تحقیقات وسیعی جهت رفع عیوب، بهبود خواص و گسترش این دسته از پوشش‌ها در جریان ‌می‌باشد. با این حال، یکی از مشکلات عمده پوشش‌های الماس مصنوعی این است که این پوشش‌ها تحت بارگذاری بالا از سطح قطعه جدا ‌می‌شوند; به همین جهت تلاش محققان، بر افزایش چسبندگی این پوشش‌ها تمرکز یافته است. لازم به ذکر است که به منظور دستیابی به چسبندگی مناسب در این پوشش‌ها، می‌بایست بسیاری از خصوصیات ‌سامانه پوشش- بستر، از قبیل ضخامت بهینه پوشش و به حداقل رساندن تنش حرارتی پسماند، در نظر گرفته شود. بنابراین، به منظور دستیابی به پوشش‌های الماس مصنوعی با خواص منحصر بفرد، لازم است که ریزساختار و معماری پوشش‌ها به دقت طراحی گردد. هدف از مقاله حاضر، بررسی تحقیقات صورت گرفته در زمینه مشخصه‌ها و بهبود عملکرد این خانواده مهم از پوشش‌های محافظ، ‌می‌باشد.

کلیدواژه‌ها

موضوعات

عنوان مقاله [English]

A Review of the Characteristics of Synthetic Diamond Coatings Prepared by Chemical Vapor Deposition (CVD) Technique

نویسندگان [English]

  • Sara Khamseh 1
  • elahe sharifi 2
  • Mohsen Mohammad Raei Nayini 3
1 Department of Nanomaterials and Nanocoatings, Institute for Colour Science and Technology
2 Faculty of Energy Engineering, Shahid Beheshti University
3 Department of Printing Science and Technology, Institute for Color Science and Technology
چکیده [English]

Diamond has unique properties compared to other materials. Despite these features, its application in the industry is minimal due to its scarcity and high price. Due to recent technological advances, it has become possible to deposit thin synthetic diamond coatings on the surface of various substrates such as metal and ceramics. For example, tungsten carbide–cobalt composites (WC-Co) are common materials in tribological applications and cutting tools that synthetic diamond coatings can be deposited on them. Reports in this field show that the deposition of synthetic diamond coatings by chemical vapor deposition (CVD) on the surface of carbide tools significantly improves their mechanical and tribological properties and leads to improved performance. The industrial use of synthetic diamond coatings has increased due to high wear resistance, excellent hardness, and low friction coefficient. For this reason, extensive research has been done to eliminate defects, improve the properties, and expand this category of coatings. However, one of the significant problems of synthetic diamond coatings is their low adhesion strength on the tool surfaces; Therefore, many researchers have focused on increasing the adhesion of these coatings. To achieve proper adhesion in these coatings, many characteristics of the coating-substrate system, such as the optimal thickness of the coating and minimizing the residual thermal stress, must be considered. Therefore, to attain synthetic diamond coatings with unique properties, it is necessary to design the microstructure and architecture of the coatings carefully. This article aims to review the researches conducted to improve the performance of diamond protective coatings.
 

کلیدواژه‌ها [English]

  • Synthetic diamond coatings
  • Chemical vapor deposition (CVD)
  • Tribological performance
  • Adhesion
  • Surface modification

مراجع

  1. س. خمسه، "پوشش‌های نانوساختار سخت: طراحی، تهیه و کاربردها"، نشریه علمی مطالعات در دنیای رنگ، 3، 54-47، 1392.
  2. س .خمسه، ا. علی بخشی، "کاربردهای زیستی پوشش‌های نانوساختار بر پایه کربن"،‌ 10، 40-29، 1399.
  3. Khamseh, E. Alibakhshi, B. Ramezanzadeh, M. G. Sari. "A tailored pulsed substrate bias voltage deposited (aC: Nb) thin-film coating on GTD-450 stainless steel: Enhancing mechanical and corrosion protection characteristics", Chem Eng. J. 404, 126490, 2021.
  4. Schwander, K. Partes. "A review of diamond synthesis by CVD processes". Diamond Relat. Mater. 20, 1287-301, 2011.
  5. T. R. Oktay, N. P. Suh, "Wear debris formation and agglomeration". J. Tribol. 114, 379-393, 1992.
  6. Aronov, A. F. D’Souza, S. Kalpakjian, I. Shareef. "Experimental Investigation of the Effect of System Rigidity on Wear and Friction-Induced Vibrations", J. Lubr. Technol. 105, 206-211, 1983.
  7. Aronov, A. F. D’Souza, S. Kalpakjian, I. Shareef. "Interactions Among Friction, Wear, and System Stiffness—Part 1: Effect of Normal Load and System Stiffness". J. Tribol. 106, 54-58, 1984.
  8. Sein, W. Ahmed, M. Jackson, R. Woodwards, R. Polini. "Performance and characterisation of CVD diamond coated, sintered diamond and WC–Co cutting tools for dental and micromachining applications", Thin Solid Films. 447-448, 455-461, 2004.
  9. Lu, H. Gomez, X. Xiao, M. Lukitsch, D. Durham, A. Sachdeve, "Coating thickness and interlayer effects on CVD-diamond film adhesion to cobalt-cemented tungsten carbides", Surf Coat Technol. 215, 272-279, 2013.
  10. Polini, F. Bravi, F. Casadei, P. D'Antonio, E. Traversa. "Effect of substrate grain size and surface treatments on the cutting properties of diamond coated Co-cemented tungsten carbide tools". Diamond Relat. Mater. 11, 726-30, 2002.
  11. Sein, W. Ahmed, M. Jackson, R. Polini, I. Hassan, M. Amar, "Enhancing nucleation density and adhesion of polycrystalline diamond films deposited by HFCVD using surface treaments on Co cemented tungsten carbide". Diamond Relat. Mater. 13, 610-615, 2004.
  12. Qin, J. Hu, Y. K. Chou, R. G. Thompson. "Delamination wear of nano-diamond coated cutting tools in composite machining". Wear. 267, 991-995, 2009.
  13. B. Milan, S. Khamseh, P. Zarrintaj, B. Ramezanzadeh, M. Badawi, S. Morisset, "Copper-enriched diamond-like carbon coatings promote regeneration at the bone–implant interface". Heliyon. 6, 3798, 2020.
  14. Inspektor, E. Oles, C. Bauer. "Theory and practice in diamond coated metal-cutting tools". Int J Refract Met Hard Mater. 15, 49-56, 1997.
  15. H. Sun, Z. M. Zhang, M. Chen, H. Shen. "Improvement of adhesive strength and surface roughness of diamond films on Co-cemented tungsten carbide tools". Diamond Relat Mater. 12, 708-711, 2003.
  16. A. Almeida, M. Amaral, F. J. Oliveira, A. J. S. Fernandes, R. F. Silva. "Nano to micrometric HFCVD diamond adhesion strength to Si3N4". Vacuum. 81, 1443-1447, 2007.
  17. Krueger. "New Carbon Materials: Biological Applications of Functionalized Nanodiamond Materials". Chem. Eur. J. 14, 1382-1390, 2008.
  18. Jiang, K. Sugimoto, K. Eguchi, T. Inaoka, Y. Shintani, H. Makita, "Reducing the grain size for fabrication of nanocrystalline diamond films", J. Cryst. Growth. 222, 591-594, 2001.
  19. A. Williams. "Nanocrystalline diamond", Diamond Relat Mater. 20, 621-640, 2011.
  20. M. T. Thompson, P. W. May. "Diamond thin films: a 21st-century material", Philos. Trans. R. Soc. 358, 473-95, 2000.
  21. M. A. Fuentes-Fernandez, J. J. Alcantar-Peña, G. Lee, A. Boulom, H. Phan, B. Smith, "Synthesis and characterization of microcrystalline diamond to ultrananocrystalline diamond films via Hot Filament Chemical Vapor Deposition for scaling to large area applications", Thin Solid Films. 603, 8-62, 2016.
  22. L. Choy. "Chemical vapour deposition of coatings". Prog Mater. Sci. 48, 57-170, 2003.
  23. K. Sarangi, A. Chattopadhyay, A. K. Chattopadhyay. "Influence of process parameters on growth of diamond crystal on cemented carbide substrates by HFCVD system", Int J Refract Met Hard Mater. 31, 1-13, 2012.
  24. Liang, L. Wang, H. Zhu, D. Yang. "Effect of pressure on nanocrystalline diamond films deposition by hot filament CVD technique from CH4/H2 gas mixture", Surf. Coat. Technol. 202, 261-267, 2007.
  25. C. Angus, H. A. Will, W. S. Stanko. "Erratum: Growth of Diamond Seed Crystals by Vapor Deposition". J. Appl. Phys. 39, 5818, 1968.
  26. Zhang, N. Ali, "Nanocomposite thin films and coatings : processing, properties and performance", London, Imperial College Press, 2007.
  27. Jin, T. D. Moustakas. "Electrical conductivity studies of diamond films prepared by electron cyclotron resonance microwave plasma", Appl. Phys. Lett. 63, 2354-2356, 1993.
  28. M. Gruen. "Nanocrystalline Diamond Films". Annu Rev Mater Sci. 29, 211-259, 1999.
  29. Najar, N. Sheikh, M. Shah. "Enhancement in Tribological and Mechanical Properties of Cemented Tungsten Carbide Substrates using CVD-diamond Coatings", Tribol. Ind. 39, 2017.
  30. Teii, T. Ikeda, A. Fukutomi, K. Uchino. "Effect of hydrogen plasma exposure on the amount of trans-polyacetylene in nanocrystalline diamond films", J. Vac. Sci. Technol. B. 24, 263-266, 2006.
  31. W. May, J. A. Smith, Y. A. Mankelevich. "Deposition of NCD films using hot filament CVD and Ar/CH4/H2 gas mixtures", Diamond Relat. Mater. 15, 345-352, 2006.
  32. Kumar, K. Panda, S. Dash, C. Popov, J. P. Reithmaier, B. K. Panigrahi, "Tribological properties of nanocrystalline diamond films deposited by hot filament chemical vapor deposition", AIP Adv. 2, 032164, 2012.
  33. Schneider, D. Steinmueller-Nethl, M. Roy, F. Franek. "Enhanced tribological performances of nanocrystalline diamond film". Int. J. Refract. Met. Hard Mater. 28, 40-50, 2010.
  34. J. Trava-Airoldi, E. J. Corat, A. F. V. Peña, N. F. Leite, V. Baranauskas, M. C. Salvadori. "Columnar CVD diamond growth structure on irregular surface substrates", Diamond Relat Mater. 4, 1255-1259, 1995.
  35. -D. Jeon, C. J. Park, D.-Y. Kim, N. M. Hwang. "Effect of methane concentration on size of charged clusters in the hot filament diamond CVD process". J. Cryst. Growth. 223, 6-14, 2001.
  36. W. May, M. N. R. Ashfold, Y. A. Mankelevich. "Microcrystalline, nanocrystalline, and ultrananocrystalline diamond chemical vapor deposition: Experiment and modeling of the factors controlling growth rate, nucleation, and crystal size". J. Appl. Phys. 101, 053115, 2007.
  37. Gicquel, F. o. Silva, K. Hassouni. "Diamond Growth Mechanisms in Various Environments". J. Electrochem. Soc. 147, 2218, 2000.
  38. Arda Gozen, O. Burak Ozdoganlar. "Wear of ultrananocrystalline diamond AFM tips during mechanical nanomanufacturing by nanomilling", Wear. 317, 39-55, 2014.
  39. Schäfer, M. Höfer, R. Kröger. "The versatility of hot-filament activated chemical vapor deposition", Thin Solid Films. 515, 1017-1024, 2006.
  40. W. Comerford, U. F. S. D'Haenens-Johansson, J. A. Smith, M. N. R. Ashfold, Y. A. Mankelevich. "Filament seasoning and its effect on the chemistry prevailing in hot filament activated gas mixtures used in diamond chemical vapour deposition", Thin Solid Films. 516, 521-525, 2008.
  41. F. Zhang, V. Buck. "Lower filament temperature limit of diamond growth in a hot-filament CVD system", Surf Coat Technol. 160, 9-14, 2002.
  42. Herlinger. "sp3's experience using hot filament CVD reactors to grow diamond for an expanding set of applications", Thin Solid Films. 501, 65-69, 2006.
  43. Chen, Q. Chen, Z. Lin. "High efficiency deposition of diamond film by hot filament chemical vapor deposition", J Mater Res. 11, 2957-2960, 2011.
  44. Ikeda, H. Ito, M. Hiramatsu, M. Hori, T. Goto. "Effects of H, OH, and CH3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor". J. Appl. Phys. 82, 4055-4061, 1997.
  45. S. Knight, W. B. White. "Characterization of diamond films by Raman spectroscopy". J. Mater. Res. 4, 385-393, 2011.
  46. Varade, K. N. Reddy, D. Sasen, A. Krishna, M. Chellamalai, P. V. Shashikumar. "Detailed Raman Study of DLC Coating on Si (100) Made by RF-PECVD", Procedia Engineering, 97, 1452-1456, 2014.
  47. Kuzmany, R. Pfeiffer, N. Salk, B. Günther. "The mystery of the 1140 cm−1 Raman line in nanocrystalline diamond films", Carbon. 42, 911-917, 2004.
  48. Lei, B. Shen, S. Chen, L. Wang, F. Sun. "Tribological behavior between micro- and nano-crystalline diamond films under dry sliding and water lubrication", Tribol. Int. 69, 118-27, 2014.
  49. Kulisch, C. Popov, S. Boycheva, L. Buforn, G. Favaro, N. Conte. "Mechanical properties of nanocrystalline diamond/amorphous carbon composite films prepared by microwave plasma chemical vapour deposition", Diamond Relat. Mater. 13, 1997-2002, 2004.
  50. J. Bull, A. Matthews. "Diamond for wear and corrosion applications", Diamond Relat Mater. 1, 1049-1064, 1992.
  51. Wiora, K. Brühne, A. Flöter, P. Gluche, T. M. Willey, S. O. Kucheyev, "Grain size dependent mechanical properties of nanocrystalline diamond films grown by hot-filament CVD". Diamond Relat. Mater. 18, 927-930, 2009.
  52. Benarioua, J. Lesage, D. Chicot, M. Moisan. "Structure and hardness of diamond films deposited on WC–Co by CVD technique", Surf Coat Technol. 227, 70-74, 2013.
  53. J. Narayan, W. Wei, C. Jin, M. Andara, A. Agarwal, R. A. Gerhardt, "Microstructural and biological properties of nanocrystalline diamond coatings", Diamond Relat. Mater. 15, 1935-1940, 2006.
  54. A. Muratov, T. Luangvaranunt, T. E. Fischer. "The tribochemistry of silicon nitride: effects of friction, temperature and sliding velocity", Tribol Int. 31, 601-611, 1998.
  55. J. Bull, P. R. Chalker, C. Johnston, V. Moore. "The effect of roughness on the friction and wear of diamond thin films". Surf. Coat. Technol. 68, 603-610, 1994.
  56. S. Forbes, J. I. B. Wilson. "Diamond and hard carbon films for microelectromechanical systems (MEMS)—a nanotribological study". Thin Solid Films. 420, 508-514, 2002.
  57. Liang, A. Stanishevsky, Y. K. Vohra. "Tribological properties of undoped and boron-doped nanocrystalline diamond films", Thin Solid Films. 517, 800-804, 2008.
  58. Wang, J. Zhou, H. Y. Long, Y. N. Xie, X. W. Zhang, H. Luo, "Tribological, anti-corrosive properties and biocompatibility of the micro- and nano-crystalline diamond coated Ti6Al4V". Surf. Coat. Technol. 258, 1032-1038, 2014.
  59. Zhang, X. Wang, B. Shen, F. Sun. "Effect of boron and silicon doping on improving the cutting performance of CVD diamond coated cutting tools in machining CFRP". Int. J. Refract Met. Hard Mater. 41, 285-292, 2013.
  60. E. Sukuroglu, Y. Totik, E. Arslan, I. Efeoglu. "Analysis of Tribo-corrosion Properties of MAO/DLC Coatings Using a Duplex Process on Ti6Al4V Alloys", J Bio. Tribo. Corros. 1, 22, 2015.
  61. K. Khanna. "Adhesion–delamination phenomena at the surfaces and interfaces in microelectronics and MEMS structures and packaged devices", J. Phys. D. Appl. Phys. 44, 034004, 2010.
  62. Wang, J. Liu, T. Tang, N. Xie, F. Sun. "The optimization of the doping level of boron, silicon and nitrogen doped diamond film on Co-cemented tungsten carbide inserts", Physica B. 550, 280-293, 2018.
  63. Qin, Y. K. Chou, D. Nolen, R. G. Thompson. "Coating thickness effects on diamond coated cutting tools", Surf. Coat. Technol. 204, 1056-1060, 2009.
  64. Nesládek, K. Vandierendonck, C. Quaeyhaegens, M. Kerkhofs, L. M. Stals. "Adhesion of diamond coatings on cemented carbides", Thin Solid Films. 270, 184-188, 1995.
  65. Xu, L. Lev, M. Lukitsch, A. Kumar. "Effects of surface pretreatments on the deposition of adherent diamond coatings on cemented tungsten carbide substrates", Diamond Relat Mater. 16, 461-466, 2007.
  66. Tang, Q. Wang, S. Wang, F. Lu. "Adherent diamond coatings on cemented carbide substrates with different cobalt contents", Diamond Relat Mater. 10, 1700-1704, 2001.
  67. Saito, T. Isozaki, A. Masuda, K. Fukumoto, M. Chosa, T. Ito, "Adhesion strength of diamond film on cemented carbide insert". Diamond Relat Mater. 2, 1391-1395, 1993.
  68. C. Nistor, J. Van Landuyt, V. G. Ralchenko, E. D. Obraztsova, A. A. Smolin. "Nanocrystalline diamond films: transmission electron microscopy and Raman spectroscopy characterization". Diamond Relat Mater. 6, 159-68, 1997.
  69. Malcher, A. Mrška, A. Kromka, A. Šatka, J. Janı́k. "Diamond film coated on WC/Co tools by double bias-assisted hot filament CVD", Curr Appl Phys. 2, 201-204, 2002.
  70. S. Raghuveer, S. N. Yoganand, K. Jagannadham, R. L. Lemaster, J. Bailey. "Improved CVD diamond coatings on WC–Co tool substrates". Wear. 253, 1194-1206, 2002.
  71. Kamiya, H. Takahashi, R. Polini, P. D'Antonio, E. Traversa. "Effect of WC-Co substrates pre-treatment and microstructure on the adhesive toughness of CVD diamond". Diamond Relat Mater. 10, 786-789, 2001.
  72. Ramasubramanian, N. Arunachalam, M. S. Ramachandra Rao. "Investigation on tribological behaviour of boron doped diamond coated cemented tungsten carbide for cutting tool applications", Surf. Coat. Technol. 332, 332-340, 2017.
  73. J. Oles, A. Inspektor, C. E. Bauer. "The new diamond-coated carbide cutting tools". Diamond Relat. Mater. 5, 617-624, 1996.
  74. Haubner, W. Kalss. "Diamond deposition on hardmetal substrates – Comparison of substrate pre-treatments and industrial applications", Int. J. Refract. Met. Hard Mater. 28, 475-483, 2010.
  75. Polini. "Chemically vapour deposited diamond coatings on cemented tungsten carbides: Substrate pretreatments, adhesion and cutting performance", Thin Solid Films. 515, 4-13, 2006.
  76. Polini, F. Le Normand, G. Marcheselli, E. Traversa. "Early Stages of Diamond-Film Formation on Cobalt-Cemented Tungsten Carbide". J. Am. Ceram. Soc. 82, 1429-35, 1999.
  77. A. Williams, M. Daenen, J. D'Haen, K. Haenen, J. Maes, V. V. Moshchalkov, "Comparison of the growth and properties of ultrananocrystalline diamond and nanocrystalline diamond", Diamond Relat Mater. 15, 654-658, 2006.
  78. G. Buijnsters, L. Vázquez, J. J. ter Meulen. "Substrate pre-treatment by ultrasonication with diamond powder mixtures for nucleation enhancement in diamond film growth". Diamond Relat Mater. 18, 1239-1246, 2009.
  79. V. Sumant, P. U. P. A. Gilbert, D. S. Grierson, A. R. Konicek, M. Abrecht, J. E. Butler, "Surface composition, bonding, and morphology in the nucleation and growth of ultra-thin, high quality nanocrystalline diamond films". Diamond Relat. Mater. 16, 718-724, 2007.
  80. Amaral, D. J. Silva, A. J. S. Fernandes, F. M. Costa, F. J. Oliveira, R. F. Silva. "Surface activation pre-treatments for NCD films grown by HFCVD". Vacuum. 83, 1228-1232, 2009.
  81. Gomez, D. Durham, X. Xiao, M. Lukitsch, P. Lu, K. Chou, "Adhesion analysis and dry machining performance of CVD diamond coatings deposited on surface modified WC–Co turning inserts", J. Mater. Process. Technol. 212, 523-533, 2012.
  82. X. Lu, W. Z. Tang, Y. M. Tong, J. Q. Miao, L. F. He, C. M. Li, "Novel pretreatment of hard metal substrate for better performance of diamond coated cutting tools". Diamond Relat. Mater. 15, 2039-2045, 2006.
  83. J. Papo, S. A. Catledge, Y. K. Vohra, C. Machado. "Mechanical wear behavior of nanocrystalline and multilayer diamond coatings on temporomandibular joint implants". J. Mater. Sci. Mater. Med. 15, 773-777, 2004.
  84. Vojs, M. Veselý, R. Redhammer, J. Janík, M. Kadlečíková, T. Daniš, "Double bias HF CVD multilayer diamond films on WC–Co cutting tools", Diamond Relat. Mater. 14, 613-6, 2005.
  85. Shen, F. Sun. "Deposition and friction properties of ultra-smooth composite diamond films on Co-cemented tungsten carbide substrates", Diamond Relat. Mater. 18, 238-243, 2009.
  86. P. Ma, G. F. Yuan, M. Chen. "Fabrication and cutting performance of ultrafine grain composite diamond coated drills", Adv. Mater Res. 188, 387-391, 2011.
  87. Yan, Y. Wu, D. Cristea, L. Liu, M. Tierean, Y. Wang, "Mechanical properties and wear behavior of multi-layer diamond films deposited by hot-filament chemical vapor deposition". Appl. Surf. Sci. 494, 401-411, 2019.
  88. R. Chromik, A. L. Winfrey, J. Lüning, R. J. Nemanich, K. J. Wahl. "Run-in behavior of nanocrystalline diamond coatings studied by in situ tribometry". Wear. 265, 477-489, 2008.
  89. H. Dauskardt, M. Lane, Q. Ma, N. Krishna. "Adhesion and debonding of multi-layer thin film structures". Eng. Fract. Mech. 61, 141-162, 1998.
  90. Booth, S. A. Catledge, D. Nolen, R. G. Thompson, Y. K. Vohra. "Synthesis and Characterization of Multilayered Diamond Coatings for Biomedical Implants". Mater. 4, 857-868, 2011.
  91. A. Almeida, E. Salgueiredo, F. J. Oliveira, R. F. Silva, D. L. Baptista, S. B. Peripolli, "Interfaces in Nano-/Microcrystalline Multigrade CVD Diamond Coatings", ACS Appl. Mater. Interfaces. 5, 11725-11729, 2013.
  92. Tzeng, M. Yoshikawa, M. Murakawa, A. Feldman, Applications of Diamond Films and Related Materials: Proceedings of the First International Conference on the Applications of Diamond Films and Related Materials-ADC'91, Auburn, Alabama, USA, August 17-22, 1991: Elsevier; 2017.
  93. Dai, J. Li, N. Lu. "Research progress of diamond/copper composites with high thermal conductivity". Diamond Relat Mater. 108, 107993, 2020.
  94. Wörner, C. Wild, W. Müller-Sebert, R. Locher, P. Koidl. "Thermal conductivity of CVD diamond films: high-precision, temperature-resolved measurements". Diamond Relat. Mater. 5, 688-92, 1996.
  95. Sternschulte, J. Horseling, T. Albrecht, K. Thonke, R. Sauer. "Characterization of doped and undoped CVD-diamond films by cathodoluminescence". Diamond Relat Mater. 5, 585-8, 1996.
  96. V. Hainsworth, N. J. Uhure. "Diamond like carbon coatings for tribology: production techniques, characterisation methods and applications". Int. Mater Rev. 52, 153-174, 2007.
  97. S. Balmer, J. R. Brandon, S. L. Clewes, H. K. Dhillon, J. M. Dodson, I. Friel, "Chemical vapour deposition synthetic diamond: materials, technology and applications". J. Phys: Condens. Matter. 21, 364221, 2009.
  98. Varshney, C. V. Rao, M. J. F. Guinel, Y. Ishikawa, B. R. Weiner, G. Morell. "Free standing graphene-diamond hybrid films and their electron emission properties". J. Appl. Phys. 110, 044324, 2011.
  99. Fujii. "High-frequency surface acoustic wave filter based on diamond thin film", physica. Status. Solidi. 208, 1072-1077, 2011.
  100. Zhang, S. D. Janssens, J. Vanacken, M. Timmermans, J. Vacík, G. W. Ataklti, "Role of grain size in superconducting boron-doped nanocrystalline diamond thin films grown by CVD", Phys. Rev. B. 84, 214517, 2011.
  101. Koizumi, M. Kamo, Y. Sato, S. Mita, A. Sawabe, A. Reznik, "Growth and characterization of phosphorus doped n-type diamond thin films", Diamond Relat. Mater. 7, 540-544, 1998.
  102. Show, M. A. Witek, P. Sonthalia, G. M. Swain. "Characterization and Electrochemical Responsiveness of Boron-Doped Nanocrystalline Diamond Thin-Film Electrodes", Chem Mater. 15, 879-888, 2003.
  103. x. Cui, J. g. Zhang, F. h. Sun, Z. m. Zhang, "Si-doped diamond films prepared by chemical vapour deposition", Trans. Nonferrous. Met. Soc. China. 23, 2962-2970, 2013.

 

مطالعات در دنیای رنگ
دوره 11، شماره 3
آذر 1400
صفحه 27-43

فایل ها

سابقه مقاله

  • تاریخ دریافت: 11 خرداد 1400
  • تاریخ بازنگری: 28 شهریور 1400
  • تاریخ پذیرش: 29 شهریور 1400

هم رسانی

ارجاع به این مقاله

آمار